The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
May. 07, 2007
Stephen Mark Lambert, Castro Valley, CA (US);
Dennis Mullins, Sunnyvale, CA (US);
Cuong Manh Ta, San Jose, CA (US);
Peter Wing Leung, Fremont, CA (US);
Stephen Mark Lambert, Castro Valley, CA (US);
Dennis Mullins, Sunnyvale, CA (US);
Cuong Manh Ta, San Jose, CA (US);
Peter Wing Leung, Fremont, CA (US);
Intermolecular, Inc., San Jose, CA (US);
Abstract
A doctor blade assembly for use in combination with apparatus for forming a film on a substrate. The doctor blade assembly includes a doctor blade to be mounted on a programmable robot. The doctor blade has a bottom face and spacers at opposite ends of the body of the doctor blade extending a predetermined distance down below the bottom face of the body for contacting a substrate and spacing the bottom face from the substrate. The spacers are adjustable relative to the doctor blade for adjusting the predetermined distance according to the thickness of film to be formed on the substrate. Other aspects and methods are also disclosed.