The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2013
Filed:
Oct. 15, 2009
Gerald Schoenecker, Munich, DE;
Stefan Lanio, Erding, DE;
Gerald Schoenecker, Munich, DE;
Stefan Lanio, Erding, DE;
Abstract
An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis () is provided, including a primary charged particle beam inlet (), a primary charged particle beam outlet () encompassing the optical axis, a magnetic deflection element () adapted to generate a magnetic field, and an electrostatic deflection element () adapted to generate an electric field overlapping the magnetic field, wherein at least one element chosen from the electrostatic deflection element and the magnetic deflection element is positioned and/or positionable to compensate an octopole influence.