The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2013
Filed:
Jul. 15, 2005
Soo Young Choi, Fremont, CA (US);
Beom Soo Park, San Jose, CA (US);
Quanyuan Shang, Saratoga, CA (US);
John M. White, Hayward, CA (US);
Dong-kil Yim, Sungnam, KR;
Chung-hee Park, Seoul, KR;
Soo Young Choi, Fremont, CA (US);
Beom Soo Park, San Jose, CA (US);
Quanyuan Shang, Saratoga, CA (US);
John M. White, Hayward, CA (US);
Dong-Kil Yim, Sungnam, KR;
Chung-Hee Park, Seoul, KR;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate support and method for fabricating the same are provided. In one embodiment of the invention, a substrate support includes an electrically conductive body having a substrate support surface that is covered by an electrically insulative coating. At least a portion of the coating centered on the substrate support surface has a surface finish of between about 200 to about 2000 micro-inches. In another embodiment, a substrate support includes an anodized aluminum body having a surface finish on the portion of the body adapted to support a substrate thereon of between about 200 to about 2000 micro-inches. In one embodiment, a substrate support assembly includes an electrically conductive body having a substrate support surface, a substrate support structure that is adapted to support the conductive body and the conductive body is covered by an electrically insulative coating.