The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
Jan. 26, 2011
Applicant:
Jeng-jye Shau, Palo Alto, CA (US);
Inventor:
Jeng-Jye Shau, Palo Alto, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract
Using developed photo-resist materials as insulator materials for through-hole connections, the preferred embodiments of the present invention improve the area efficiency of electrical devices manufactured on silicon substrates. The area efficiency is further improved by opening holes from both sides of silicon substrate to form through-holes. Besides area efficiency, these methods also provide better control in parasitic impedance of through-hole connection.