The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
Sep. 28, 2011
Hubert Mantz, Aalen, DE;
Rainer Arnold, Ulm, DE;
Michael Albiez, Aalen, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
A particle beam system comprises a particle beam sourcefor generating a primary particle beam, an objective lensfor focusing the primary particle beamin an object plane; a particle detector; and an X-ray detectorarranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surfaceoriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.