The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 05, 2013

Filed:

Jun. 07, 2006
Applicants:

Jung-hun Seo, Suwon-si, KR;

Jin-gi Hong, Suwon-si, KR;

Kyung-bum Koo, Yongin-si, KR;

Yun-ho Choi, Yongin-si, KR;

Eun-taeck Lee, Suwon-si, KR;

Hyun Chul Kwun, Hwaseong-si, KR;

Inventors:

Jung-Hun Seo, Suwon-si, KR;

Jin-Gi Hong, Suwon-si, KR;

Kyung-Bum Koo, Yongin-si, KR;

Yun-Ho Choi, Yongin-si, KR;

Eun-Taeck Lee, Suwon-si, KR;

Hyun Chul Kwun, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract

Disclosed are chamber inserts and apparatuses using the chamber inserts. A chamber insert may include a cylindrical body portion including a top end portion and a bottom end portion, a first protruding portion extending outwardly from a first portion of the cylindrical body portion, the first portion positioned circumferentially along the cylindrical body portion and a second protruding portion extending outwardly from a second portion of the cylindrical body portion, the second portion positioned circumferentially along less than all of the cylindrical body portion. In another example, the chamber insert may include a cylindrical body portion including a top end portion and a bottom end portion, the cylindrical body portion including a slit and at least one hole, the slit and the at least one hole positioned circumferentially along the cylindrical body portion and a first protruding portion extending outwardly from a first portion of the cylindrical body portion.


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