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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8361691 B1

PDFFull Text
Date of Patent:
Jan. 29, 2013

Filed:

Aug. 28, 2007

Radiation-sensitive composition and process for producing low-molecular compound for use therein

Applicants:

Nobuji Matsumura, Tokyo, JP;

Daisuke Shimizu, Tokyo, JP;

Toshiyuki Kai, Tokyo, JP;

Inventors:

Nobuji Matsumura, Tokyo, JP;

Daisuke Shimizu, Tokyo, JP;

Toshiyuki Kai, Tokyo, JP;

Assignee:

JSR Corporation, Tokyo, JP;

Attorney:

Ditthavong Mori & Steiner, P.C.

Primary Examiner:

Cynthia Hamilton

Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/039 (2006.01); C07C 309/12 (2006.01); C07C 381/12 (2006.01); C07C 69/96 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
Abstract

A radiation-sensitive composition contains (A) a low-molecular-weight compound having one or more acid-dissociable groups which decompose by the action of an acid to enhance solubility in an alkaline developing solution and one or more radiation-sensitive acid-generating groups which generate an acid upon application of an active ray or radiation per molecule, and having a polystyrene-reduced number-average molecular weight (Mn) measured by gel permeation chromatography (GPC) of 500 to 4,000, and (B) a solvent.

Find Patent Forward Citations

Matsumura, Nobuji. (2013). Radiation-sensitive composition and process for producing low-molecular compound for use therein (U.S. Patent No. 8361691). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8361691

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