The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8361337 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 29, 2013

Filed:

Mar. 17, 2008
Applicants:

Soojin Park, Amherst, MA (US);

Thomas P. Russell, Amherst, MA (US);

Jia-yu Wang, Amherst, MA (US);

Bokyung Kim, Amherst, MA (US);

Inventors:

Soojin Park, Amherst, MA (US);

Thomas P. Russell, Amherst, MA (US);

Jia-Yu Wang, Amherst, MA (US);

Bokyung Kim, Amherst, MA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B31D 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Nanopatterned substrates can be prepared by a method that includes forming a block copolymer film on a substrate, annealing the block copolymer film, surface reconstructing the annealed block copolymer film, coating an etch-resistant layer on the surface reconstructed block copolymer film, etching the resist-coated block copolymer film to create an etched article comprising a nanopatterned substrate, and separating the etch-resistant layer and the block copolymer film from the nanopatterned substrate. The method is applicable to a wide variety of substrate materials, avoids any requirement for complicated procedures to produce long-range order in the block copolymer film, and avoids any requirement for metal functionalization of the block copolymer.


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