Connection structure of two-dimensional array optical element and optical circuit

Abstract

Optical elements (light sourcesor photodetectors) are arranged in a two-dimensional array, and the relative positional relationship between the optical elements and optical waveguidesis defined such that optical waveguidesextend between the optical elements in the two-dimensional array substantially parallel to substratefor increased parallelism. Micromirrorsare disposed in respective optical waveguidesto bend light beams through 90 degrees to realize a highly efficient optical coupling between the optical elements and optical waveguides. The optical waveguides are stacked in multiple stages, and light beams are lead to the optical waveguides in the multiple stacks through micromirrorsacross the stacked plane of the optical waveguides, thereby realizing parallel connection between the two-dimensional array of optical elements and a two-dimensional array of optical waveguides. There is thus provided a connection structure between the optical elements and optical waveguides, which is small in size and high in efficiency, and is of high parallelism.