The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
Nov. 04, 2010
James Randolph Webster, San Jose, CA (US);
Thanh Nghia Tu, San Jose, CA (US);
Xiaoming Yan, Sunnyvale, CA (US);
Wonsuk Chung, San Jose, CA (US);
James Randolph Webster, San Jose, CA (US);
Thanh Nghia Tu, San Jose, CA (US);
Xiaoming Yan, Sunnyvale, CA (US);
Wonsuk Chung, San Jose, CA (US);
QUALCOMM MEMS Technologies, Inc., San Diego, CA (US);
Abstract
Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.