The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
Mar. 09, 2011
Shih-chi Fu, Taipei, TW;
Gwo-yuh Shiau, Hsinchu, TW;
Liang-lung Yao, Taipei, TW;
Yuan-chih Hsieh, Hsinchu, TW;
Feng-jia Shiu, Hsinchu, TW;
Shih-Chi Fu, Taipei, TW;
Gwo-Yuh Shiau, Hsinchu, TW;
Liang-Lung Yao, Taipei, TW;
Yuan-Chih Hsieh, Hsinchu, TW;
Feng-Jia Shiu, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A method for fabricating a backside illuminated image sensor is provided. An exemplary method can include providing a substrate having a front surface and a back surface; forming an alignment mark at the front surface of the substrate, wherein the alignment mark is detectable for alignment from the back surface; and processing the substrate from the back surface by performing registration from the back surface and using the alignment mark as a reference.