The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
Sep. 26, 2007
Michael Pietzner, Dresden, DE;
Mario Illgen, Dresden, DE;
Kerstin Siury, Dresden, DE;
Frank Kuechenmeister, Dresden, DE;
Michael Pietzner, Dresden, DE;
Mario Illgen, Dresden, DE;
Kerstin Siury, Dresden, DE;
Frank Kuechenmeister, Dresden, DE;
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
By providing an enhanced drive system for electrochemical etch process tools, the operational range, as well as the reliability, may be enhanced. For this purpose, a high torque electric motor may be used in combination with an appropriate power transmission, which may be attached to a corresponding tool frame at a height level that is above a corresponding height level at which respective chemicals are provided to the substrate under process. Hence, the probability for contamination by chemicals may be significantly reduced, thereby also reducing maintenance efforts resulting in reduced production costs.