The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2013
Filed:
May. 24, 2011
Tsunenaga Nakashima, Koshi, JP;
Gouichi Iwao, Oita, JP;
Naofumi Kishita, Koshi, JP;
Nobuhiro Ogata, Koshi, JP;
Tsunenaga Nakashima, Koshi, JP;
Gouichi Iwao, Oita, JP;
Naofumi Kishita, Koshi, JP;
Nobuhiro Ogata, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.