The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 08, 2013

Filed:

Mar. 30, 2011
Applicants:

André Strittmatter, Berlin, DE;

Andrei Schliwa, Berlin, DE;

Tim David Germann, Berlin, DE;

Udo W. Pohl, Berlin, DE;

Vladimir Gaysler, Novosibirsk, RU;

Jan-hindrik Schulze, Berlin, DE;

Inventors:

André Strittmatter, Berlin, DE;

Andrei Schliwa, Berlin, DE;

Tim David Germann, Berlin, DE;

Udo W. Pohl, Berlin, DE;

Vladimir Gaysler, Novosibirsk, RU;

Jan-Hindrik Schulze, Berlin, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/36 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention inter alia relates to a method of fabricating a layer assembly comprising the steps of: arranging a first layer on top of a carrier; arranging a second layer on top of the first layer; locally modifying the material of the buried first layer and providing at least one modified section in the first layer, wherein the modified material changes or induces mechanical strain in a portion of the second layer which is arranged above the at least one modified section; after locally modifying the material of the buried first layer, depositing a third material on top of the second layer, at least one characteristic of the third material being sensitive to the local mechanical strain in the second layer.


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