The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2013
Filed:
Dec. 13, 2007
Teruyoshi Munakata, Ibaraki, JP;
Teruyoshi Munakata, Ibaraki, JP;
Is Technology Japan, Inc., Tsukuba-shi, JP;
Raytex Corporation, Tama-shi, JP;
Abstract
A disc holding apparatus including a plurality of movable holding claws, which have a holding section abutting to the outer circumference of a wafer having a notch and are arranged in the circumference direction of the wafer. The wafer is held by having each holding section on the inner edge side of each movable holding claw abut to the outer circumference of the wafer, thereby, at the time of detecting the notch by a sensor including a light source and a light receiving section, even when one of the holding sections abuts to the outer circumference of the wafer at a part where the notch exists, light from the light source is permitted to enter the light receiving section through the notch without being blocked by the holding section. Even when the wafer is held at the part where the notch exists, the wafer is not required to be correctly held again and throughput is improved with a shortened process time.