The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2013
Filed:
Aug. 25, 2009
Hartmut Illers, Hahausen, DE;
Kazuhiko Hidaka, Veldhoven, NL;
Akinori Saito, Tsukuba, JP;
Hans Ullrich Danzebrink, Braunschweig, DE;
Hartmut Illers, Hahausen, DE;
Kazuhiko Hidaka, Veldhoven, NL;
Akinori Saito, Tsukuba, JP;
Hans Ullrich Danzebrink, Braunschweig, DE;
Mitutoyo Corporation, Kawasaki, JP;
Bundesrepublik Deutschland, Endvertreten Durch den Prasidenten der Physikalisch-Technischen Bundesan, Braunschweig, DE;
Abstract
A method of detecting a movement of a measuring probe provided between an objective lens adapted to image an object plane on a predetermined image plane and the object plane is disclosed. Additionally, a measuring instrument comprising an objective lens and a measuring probe is disclosed. An input beam of light is split into a measurement beam and a reference beam. The measurement beam is focused on a reverse focal plane of the objective lens such that the measurement beam is collimated by the objective lens. The collimated measurement beam is reflected at the measuring probe. The reflected measurement beam is directed towards the objective lens such that the objective lens focuses the reflected measurement beam on the reverse focal plane. The reflected measurement beam is collimated. The collimated reference beam and the reference beam are superimposed to form a superimposed beam and an interference between the reflected measurement beam and the reference beam is detected.