The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2013
Filed:
Jun. 18, 2010
Axel Schmidt, Thiendorf OT Stölpchen, DE;
Botho Hirschfeld, Dresden, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Andrej Rumiantsev, Dresden, DE;
Michael Teich, Moritzburg OT Friedewald, DE;
Axel Schmidt, Thiendorf OT Stölpchen, DE;
Botho Hirschfeld, Dresden, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Andrej Rumiantsev, Dresden, DE;
Michael Teich, Moritzburg OT Friedewald, DE;
Cascade Microtech, Inc., Beaverton, OR (US);
Abstract
An arrangement is provided for testing DUTs with a chuck that has a support surface for supporting of a DUT as well as for supplying the support surface with a defined potential, or for connecting the DUT. The arrangement further includes a positioning device for positioning the chuck as well as an electromagnetic shielding housing enclosing at least the chuck. Inside the housing and adjacent to the chuck, a signal preamplifier is arranged whose signal port facing the chuck is electrically connected with the support surface, wherein the signal preamplifier is moveable together with the chuck by the positioning device in a way that it holds its position constant relative to the chuck during positioning. The signal preamplifier is connected to a measurement unit outside of the housing via a measurement cable.