The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2013
Filed:
Jul. 14, 2011
Manolo G. Mena, Quezon, PH;
Elmer S. Lacsamana, Pampanga, PH;
William A. Webster, Tewksbury, MA (US);
Lawrence E. Felton, Hopkinton, MA (US);
Manolo G. Mena, Quezon, PH;
Elmer S. Lacsamana, Pampanga, PH;
William A. Webster, Tewksbury, MA (US);
Lawrence E. Felton, Hopkinton, MA (US);
Analog Devices, Inc., Norwood, MA (US);
Abstract
A method of producing a MEMS device removes the bottom side of a device wafer after its movable structure is formed. To that end, the method provides the device wafer, which has an initial bottom side. Next, the method forms the movable structure on the device wafer, and then removes substantially the entire initial bottom side of the device wafer. Removal of the entire initial bottom side effectively forms a final bottom side.