The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
Oct. 14, 2010
Takeo Yamada, Tokyo, JP;
Takeshi Yamamoto, Tokyo, JP;
Takahiro Yamakura, Tokyo, JP;
Shinji Hayashi, Tokyo, JP;
Shingo Kawai, Tokyo, JP;
Takeo Yamada, Tokyo, JP;
Takeshi Yamamoto, Tokyo, JP;
Takahiro Yamakura, Tokyo, JP;
Shinji Hayashi, Tokyo, JP;
Shingo Kawai, Tokyo, JP;
Nireco Corporation, Tokyo, JP;
Abstract
A film thickness measuring device is provided with a light source, a spectroscopic sensor, a processor, and a storage unit, and configured in such a manner that light from the light source vertically enters a plane to be measured provided with a film and the light reflected by the plane to be measured enters the spectroscopic sensor. The storage unit stores theoretical values of reflectivity distributions of respective film thicknesses and theoretical values of color characteristic variables of the respective film thicknesses. The processor finds the thickness of the film of the plane to be measured from the reflectivity distribution measured by the spectroscopic sensor by using the theoretical values of the reflectivity distributions of the respective film thicknesses or the theoretical values of the color characteristic variables of the respective film thicknesses stored in the storage unit.