The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
Nov. 02, 2009
Applicants:
Juergen Schwandner, Garching, DE;
Roland Koppert, Triftern, DE;
Inventors:
Juergen Schwandner, Garching, DE;
Roland Koppert, Triftern, DE;
Assignee:
Siltronic AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
Semiconductor wafer provided with a strain-relaxed layer of SiGe, are polished in a first step of mechanical machining of the SiGelayer of the semiconductor wafer in a polishing machine using a polishing pad containing fixedly bonded abrasive materials having a particle size of 0.55 μm or less, and also a second step of a chemomechanical machining of the previously mechanically machined SiGelayer of the semiconductor wafer using a polishing pad and with supply of a polishing agent slurry containing abrasive materials.