The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
Dec. 07, 2011
Applicant:
David M. Erlach, Santa Barbara, CA (US);
Inventor:
David M. Erlach, Santa Barbara, CA (US);
Assignee:
Innovative Micro Technology, Goleta, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/31 (2006.01); H01L 21/469 (2006.01);
U.S. Cl.
CPC ...
Abstract
Systems and methods for applying a thin layer of a liquid to the surface of a wafer with topography formed therein. The systems and methods include spreading a deposit of the liquid into a thin film on a wafer support, lowering the wafer onto the film, removing the wafer with an adhering layer of the film, positioning the wafer over a device wafer with the liquid film disposed between the wafers, curing the thin layer. The thin layer may be a UV adhesive which bonds the wafers upon exposure to UV light.