The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
Jan. 26, 2010
Applicants:
Mark Ian Carruthers, Newport, GB;
Stephen Burgess, Ebbw Vale, GB;
Anthony Wilby, Bristol, GB;
Amit Rastogi, Newport, GB;
Paul Rich, Wotton Under Edge, GB;
Nicholas Rimmer, Oxford, GB;
Inventors:
Mark Ian Carruthers, Newport, GB;
Stephen Burgess, Ebbw Vale, GB;
Anthony Wilby, Bristol, GB;
Amit Rastogi, Newport, GB;
Paul Rich, Wotton Under Edge, GB;
Nicholas Rimmer, Oxford, GB;
Assignee:
SPTS Technologies Limited, Newport, Wales, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method induces plasma vapor deposition of metal into a recess in a workpiece. The method achieves re-sputtering of the metal at the base of the recess with a sputter gas by utilizing a mixture of Ar and He and/or Ne as the sputter gas with a ratio of He and/or Ne:Ar of at least about 10:1.