The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2012
Filed:
Aug. 03, 2007
Christoph Merkl, Staig, DE;
Christoph Merkl, Staig, DE;
Mattson Technology, Inc., Fremont, CA (US);
Abstract
The present invention describes a method for determining a value for the temperature, radiation, emissivity, transmissivity and/or reflectivity of an object () such as a semiconductor wafer in a rapid heating system (), wherein an output signal from a radiation detector () which records temperature radiation from the object is used as a measurement value, and wherein prediction values for the measurement values are calculated in a model system (). The development over time of the measurement values is compared with the development over time of the prediction values and the measurement value is corrected if the difference exceeds predetermined threshold value.