The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2012
Filed:
Mar. 22, 2007
Masahiro Katsumura, Tsurugashima, JP;
Masahiro Katsumura, Tsurugashima, JP;
NuFlare Technology, Inc., Numazu-shi, JP;
Abstract
A master disk exposing apparatus having: a turntable for rotating a master disk; moving means for horizontally moving the turntable in at least one direction; beam irradiating means for irradiating an electron beam toward the turntable, thereby forming a beam spot onto the turntable or the master disk; beam deflecting means for deflecting the beam; and control means for controlling the moving means, the beam irradiating means, and the beam deflecting means, wherein the control means includes initializing means for executing an initial operation to drive at least either the moving means or the beam deflecting means and make an origin of the beam spot coincide with a rotational center of the turntable at the time of activation. An apparatus and a method for easily adjusting a deviation between an origin of an irradiating position of the recording beam and the rotational center of the turntable are, thus, provided.