The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2012
Filed:
Sep. 21, 2011
Kyoichi Mori, Kodama-gun, JP;
Naoaki Yamashita, Kodama-gun, JP;
Noritake Shizawa, Kodama-gun, JP;
Koji Tsushima, Kodama-gun, JP;
Kyoichi Mori, Kodama-gun, JP;
Naoaki Yamashita, Kodama-gun, JP;
Noritake Shizawa, Kodama-gun, JP;
Koji Tsushima, Kodama-gun, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A fine-structure transfer method in which a fine-featured pattern formed on one of the two surfaces of a stamper is pressed against a coating of a resist on one of the two surfaces of a transfer element so as to transfer the fine-featured pattern to the resist coating, wherein the atmosphere in the space between the stamper and the transfer element is replaced by the vapor of the resist before the stamper is pressed against the transfer element.