The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2012
Filed:
Feb. 01, 2011
Steven D. Blankenship, Melrose, MA (US);
Steven D. Blankenship, Melrose, MA (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
An improved capacitive manometer includes a diaphragm including a common electrode and an electrode structure including a center electrode and ring electrode. The diaphragm is movable between (i) a zero position when the pressure on each side of the diaphragm is the same and (ii) a maximum differential position when the maximum measurable differential pressure is applied to the diaphragm. A support structure is arranged to support the diaphragm so that the diaphragm is constrained relative to the electrode structure. The common electrode is spaced from and axially aligned with the center and ring electrodes. The electrode structure is secured relative to the diaphragm at at least three clamping locations. The angle defined within each right plane containing a point of constraint of the diaphragm and the point of each clamping location relative to the plane of the diaphragm in the zero position is between 60° and 90°.