The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2012
Filed:
Jan. 11, 2011
Cheng-hao Chen, Taipei, TW;
Yun-zong Tian, Taichung County, TW;
Shih-chang Kao, Kaohsiung, TW;
Yij Chieh Chu, Taipei County, TW;
Wei Jun Chen, Taichung County, TW;
Cheng-Hao Chen, Taipei, TW;
Yun-Zong Tian, Taichung County, TW;
Shih-Chang Kao, Kaohsiung, TW;
Yij Chieh Chu, Taipei County, TW;
Wei Jun Chen, Taichung County, TW;
Inotera Memories, Inc., Taoyuan County, TW;
Abstract
A specification establishing method for controlling semiconductor process, the steps includes: sampling a plurality of sample groups from a population, each sample group being a non-normal distribution; filtering the sample groups; summarizing the filtered sample groups to form a non-normal distribution diagram; getting a value-at-risk and a median by calculating from the non-normal distribution diagram; getting a critical value by calculating the value-at-risk and the median with a critical formula; getting a plurality of state values by calculating the filtered sample groups with a proportion formula; and getting an index value by calculating the non-normal distribution diagram with the proportion formula. Thus, the state values indicate the states of the sample groups are abnormal or not by comparing the state values to the index value.