The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2012
Filed:
Sep. 20, 2006
Applicants:
Bob Streefkerk, Tilburg, NL;
Youri Johannes Laurentius Maria Van Dommelen, Eindhoven, NL;
Richard Moerman, Son, NL;
Cédric Désiré Grouwstra, Eindhoven, NL;
Inventors:
Bob Streefkerk, Tilburg, NL;
Youri Johannes Laurentius Maria Van Dommelen, Eindhoven, NL;
Richard Moerman, Son, NL;
Cédric Désiré Grouwstra, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/32 (2006.01);
U.S. Cl.
CPC ...
Abstract
A path which a substrate should take under the projection system during immersion lithography imaging of a plurality of dies on the top surface of the substrate is disclosed.