The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2012

Filed:

Apr. 14, 2009
Applicants:

Kazuhide Asai, Toyama, JP;

Hiroyuki Iwakura, Toyama, JP;

Toshiro Koshimaki, Himishi, JP;

Kayoko Yashiki, Imizushi, JP;

Inventors:

Kazuhide Asai, Toyama, JP;

Hiroyuki Iwakura, Toyama, JP;

Toshiro Koshimaki, Himishi, JP;

Kayoko Yashiki, Imizushi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An information managing method for managing information, based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, comprises: storing the apparatus information of the substrate processing apparatus at the transmission time of the electronic message containing the apparatus information in a first apparatus information storage unit; when the electronic message containing the event information is transmitted, comparing conditions for accumulating the event information and the apparatus information; and when the conditions coincide with each other, storing the apparatus information in a second apparatus information storage unit in association with time when the event information has been generated.


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