The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Feb. 25, 2010
Lev Faivishevsky, Kfar Saba, IL;
Sergey Khristo, Ashdod, IL;
Amir Moshe Sagiv, Beit-Zayit, IL;
Shmuel Mangan, Rehovot, IL;
Lev Faivishevsky, Kfar Saba, IL;
Sergey Khristo, Ashdod, IL;
Amir Moshe Sagiv, Beit-Zayit, IL;
Shmuel Mangan, Rehovot, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
Evaluating error sources associated with a mask involves: (i) receiving data representative of multiple images of the mask that were obtained at different exposure conditions; (ii) calculating, for multiple sub-frames of each image of the mask, values of a function of intensities of pixels of each sub-frame to provide multiple calculated values; and (iii) detecting error sources in response to calculated values and in response to sensitivities of the function to each error source.