The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 04, 2012

Filed:

Nov. 10, 2009
Applicants:

Ya-mei Chen, Berkeley, CA (US);

Michael Stephen Sheppy, Alameda, CA (US);

Matthew A. Hopcroft, San Francisco, CA (US);

Albert P. Pisano, Danville, CA (US);

Rajesh Vinodrai Mehta, Rochester, NY (US);

Michael Alan Marcus, Honeoye Falls, NY (US);

Gilbert Allan Hawkins, Mendon, NY (US);

Inventors:

Ya-Mei Chen, Berkeley, CA (US);

Michael Stephen Sheppy, Alameda, CA (US);

Matthew A. Hopcroft, San Francisco, CA (US);

Albert P. Pisano, Danville, CA (US);

Rajesh Vinodrai Mehta, Rochester, NY (US);

Michael Alan Marcus, Honeoye Falls, NY (US);

Gilbert Allan Hawkins, Mendon, NY (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
Abstract

Piezoelectric actuators are provided. In some instances, the piezoelectric actuators are high-precision piezoelectric actuators. The piezoelectric beams may have a bi-chevron configuration. Also provided are methods of making the piezoelectric actuators, e.g., using Micro-Electro-Mechanical System (MEMS) fabrication techniques, and methods of using the piezoelectric actuators, e.g., as valves in fluid dispensing systems.


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