The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Jul. 23, 2009
Applicant:
E. Todd Ryan, Clifton Park, NY (US);
Inventor:
E. Todd Ryan, Clifton Park, NY (US);
Assignee:
GLOBALFOUNDRIES, Inc., Grand Cayman, KY;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract
Embodiments of a method for fabricating a semiconductor device are provided. In one embodiment, the method includes the steps of providing a partially-completed semiconductor device including a first feature formed in a porous material, wet cleaning the partially-completed semiconductor device with an aqueous cleaning solvent, exposing the partially-completed semiconductor device to a liquid chemical that forms an azeotropic mixture with water, and inducing evaporation of the azeotropic mixture to remove residual water from within the porous material absorbed during the wet cleaning step.