The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Feb. 26, 2007
Applicants:
David W. Hoey, Rio Rancho, NM (US);
Christopher T. Conley, Livermore, CA (US);
Inventors:
David W. Hoey, Rio Rancho, NM (US);
Christopher T. Conley, Livermore, CA (US);
Assignee:
Nikon Precision Inc., Belmont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G06K 7/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
An automated signature detection system and method of use and, more particularly, a predictive modeling component configured to accurately predict maintenance events for optical elements used in lithographic tools. The system comprises at least one module configured to analyze data associated with power illumination at a surface. The at least one module also is configured to fit a curve to the analyzed data using an exponentially based decay model.