The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Oct. 12, 2008
Nathan D. Stein, Mountain View, CA (US);
Younes Achkire, Los Gatos, CA (US);
Timothy J. Franklin, Campbell, CA (US);
Julia Svirchevski, San Jose, CA (US);
Dan A. Marohl, San Jose, CA (US);
Nathan D. Stein, Mountain View, CA (US);
Younes Achkire, Los Gatos, CA (US);
Timothy J. Franklin, Campbell, CA (US);
Julia Svirchevski, San Jose, CA (US);
Dan A. Marohl, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In one aspect, a substrate processing apparatus is provided. The apparatus comprises a mechanism for forming a meniscus on a surface of a substrate by moving the substrate through a fluid; an air knife apparatus positioned to apply an air knife to shorten the meniscus formed on the surface of the substrate; and a drying vapor nozzle positioned to direct a drying vapor to the meniscus shortened by the air knife. Numerous other aspects are provided.