The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2012
Filed:
Sep. 10, 2009
Arie Jeffrey Den Boef, Waalre, NL;
Andre Bernardus Jeunink, Bergeyk, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Pascal Antonius Smits, Geertruidenberg, NL;
Sander Frederik Wuister, Eindhoven, NL;
Yvonne Wendela Kruijt-stegeman, Eindhoven, NL;
Catharinus DE Schiffart, Nijmegen, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Andre Bernardus Jeunink, Bergeyk, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Pascal Antonius Smits, Geertruidenberg, NL;
Sander Frederik Wuister, Eindhoven, NL;
Yvonne Wendela Kruijt-Stegeman, Eindhoven, NL;
Catharinus De Schiffart, Nijmegen, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of determining a position of a substrate relative to an imprint template is described, wherein the imprint template has at least three gratings and the substrate has at least three gratings positioned such that each imprint template grating forms a composite grating with an associated substrate grating, the at least three imprint template gratings and associated substrate gratings having offsets relative to one another. The method includes detecting an intensity of radiation which is reflected by the three composite gratings, and using the detected intensities to determine displacement of the substrate or imprint template from a position.