The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2012
Filed:
Aug. 08, 2007
Qingxin Zhang, Singapore, SG;
Guo-qiang Patrick Lo, Singapore, SG;
Mingbin Yu, Singapore, SG;
Dim-lee Kwong, Singapore, SG;
Qingxin Zhang, Singapore, SG;
Guo-Qiang Patrick Lo, Singapore, SG;
Mingbin Yu, Singapore, SG;
Dim-Lee Kwong, Singapore, SG;
Agency for Science, Technology and Research, Singapore, SG;
Abstract
The wafer arrangement () provided comprises a first wafer (), which comprises an integrated circuit and a recess (). The wafer arrangement further comprises a portion of a second wafer (), which comprises a carrier portion and a protrusion (), the protrusion comprising an active component or actively controlled component () such as a MEMS component, wherein the portion of the second wafer () is coupled to the first wafer () such that the protrusion () is received in the recess (). The invention provides a mechanism for accurately aligning an active component () on the second wafer () with components on the first wafer (), such as photonic, electronic or optical components.