The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2012
Filed:
Nov. 05, 2004
Applicant:
Levinus Pieter Bakker, Helmond, NL;
Inventor:
Levinus Pieter Bakker, Helmond, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 17/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An optical element includes a top layer which is transmissive for EUV radiation with wavelength λ in the range of 5-20 nm, and a structure of the top layer is a structure having an rms roughness value equal to or larger than λ/10 for spatial periods equal to or smaller than λ/2. The structure promotes transmission through the top layer to the optical element.
Bakker, Levinus. (2012). Optical element, lithographic apparatus including such optical element and device manufacturing method, and device manufactured thereby (U.S. Patent No. 8318288). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8318288
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile