The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2012
Filed:
May. 15, 2007
Applicants:
Hiroyuki Hosokawa, Hokkaido, JP;
Ryoji Sakai, Tokyo, JP;
Masashi Okuyama, Kumamoto, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 3/041 (2006.01);
U.S. Cl.
CPC ...
Abstract
[Problems] A highly convenient maintenance screen needs to be displayed on a display panel when performing a maintenance while considering a correlation between a plurality of processing chambers. [Means for Solving the Problems] Since task buttons are displayed on a second display regionby arranging them from the left in an order of a time sequence in which each task button has been clicked, a highly convenient maintenance screen can be displayed on a touch panelwhen performing a maintenance.