The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2012
Filed:
May. 09, 2011
Nobuaki Matsuoka, Koshi, JP;
Yasushi Hayashida, Koshi, JP;
Shinichi Hayashi, Koshi, JP;
Tokyo Electron Limited, Tokyo-to, JP;
Abstract
A coating and developing apparatus is provided which requires a smaller occupation space even when it incorporates a substrate inspection unit, while eliminating a disadvantageous layout. A coating film forming part Bincluding a plurality of process units and transfer mechanisms Aand A, and a developing part Bincluding a plurality of process unitsand a transfer mechanism Aare vertically arranged in a process block S. There are disposed in the process block Son a side of a carrier block S, a plurality of vertically arranged transfer units TRS for transferring a substrate W between the same and transfer mechanisms for the respective parts, and a vertically movable transfer mechanism Dfor the transfer unit for transferring a substrate between these transfer units. At least one of the coating film forming part and the developing part includes a substrate inspection unitfor inspecting a substrate transferred by the transfer mechanism for the corresponding part.