The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2012
Filed:
Mar. 24, 2008
Masaru Hori, Nagoya, JP;
Hiroyuki Kano, Nagoya, JP;
Shoji Den, Yokohama, JP;
Nu Eco Engineering Co., Ltd., Nishikamo-Gun, Aichi, JP;
Katagiri Engineering Co., Ltd., Yokohama-shi, Kanagawa, JP;
Abstract
To provide a light source which realizes accurate determination of the particle density of a plasma atmosphere without disturbing the state of the plasma atmosphere. The light source of the invention includes a tubular casing; a cooling medium passagefor causing a cooling medium to flow therethrough, the passage being provided along the inner wall of the casing; a lensprovided at a tip end of the casing; a first electrodeand a second electrodewhich are provided in the casing and before the lens so as to be vertical to the axis of the casing and parallel to each other; and an insulating spacerprovided between the first electrode and the second electrode. The light source further includes a holeaxially penetrating the center portions of the first electrode, the insulating spacer, and the second electrode; and an electric discharge gas passage for introducing an electric discharge gas, along the inner wall of the cooling medium passage, to the back surface of the lens so that the electric discharge gas is reflected by thepslens and flows through the hole.