The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2012
Filed:
Feb. 01, 2011
Martinus Petrus Maria Bierhoff, Deurne, NL;
Bart Buijsse, Eindhoven, NL;
Cornelis Sander Kooijman, Veldhoven, NL;
Hugo Van Leeuwen, Eindhoven, NL;
Hendrik Gezinus Tappel, Casteren, NL;
Colin August Sanford, Atkinson, NH (US);
Sander Richard Marie Stoks, Nijmegen, NL;
Steven Berger, Newburyport, MA (US);
Ben Jacobus Marie Bormans, Asten, NL;
Koen Arnoldus Wilhelmus Driessen, Valkenswaard, NL;
Johannes Antonius Hendricus W. G. Persoon, Waalre, NL;
Martinus Petrus Maria Bierhoff, Deurne, NL;
Bart Buijsse, Eindhoven, NL;
Cornelis Sander Kooijman, Veldhoven, NL;
Hugo Van Leeuwen, Eindhoven, NL;
Hendrik Gezinus Tappel, Casteren, NL;
Colin August Sanford, Atkinson, NH (US);
Sander Richard Marie Stoks, Nijmegen, NL;
Steven Berger, Newburyport, MA (US);
Ben Jacobus Marie Bormans, Asten, NL;
Koen Arnoldus Wilhelmus Driessen, Valkenswaard, NL;
Johannes Antonius Hendricus W. G. Persoon, Waalre, NL;
FEI Company, Hillsboro, OR (US);
Abstract
A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.