The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2012
Filed:
Dec. 17, 2008
Kurt P. Wachtler, Richardson, TX (US);
Wei-yan Shih, Plano, TX (US);
Gregory E. Howard, Plano, TX (US);
Kurt P. Wachtler, Richardson, TX (US);
Wei-Yan Shih, Plano, TX (US);
Gregory E. Howard, Plano, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A hermetic MEMS device () comprising a carrier () having a surface () including a device () and an attachment stripe (), the stripe spaced from the device and surrounding the device; a metallic foil () having a central bulge portion () and a peripheral rim portion () meeting the stripe, the bulge cross section parallel to the carrier monotonically decreasing from the rim () towards the bulge apex (); and the foil positioned over the carrier surface so that the bulge arches over the device and the rim forms a seal with the stripe.