The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2012
Filed:
Dec. 14, 2006
Applicants:
Edvard Kälvesten, Hägersten, SE;
Thorbjörn Ebefors, Huddings, SE;
Thierry Corman, Bromma, SE;
Inventors:
Assignee:
Silex Microsystems AB, Jarfalla, SE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25F 3/00 (2006.01); B44C 1/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates in a general aspect to a method of making vertically protruding elements on a substrate, said elements having a tip comprising at least one inclined surface and an elongated body portion extending between said substrate and said tip. The method comprises an anisotropic, crystal plane dependent etch forming said inclined surface(s); and an anisotropic, non crystal plane dependent etch forming said elongated body portion; combined with suitable patterning processes defining said protruding elements to have a predetermined base geometry.