The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2012
Filed:
Mar. 19, 2008
Applicants:
Mitsuru Kato, Kurashiki, JP;
Hirofumi Kikuchi, Kurashiki, JP;
Chihiro Okamoto, Kurashiki, JP;
Shinya Kato, Kurashiki, JP;
Inventors:
Mitsuru Kato, Kurashiki, JP;
Hirofumi Kikuchi, Kurashiki, JP;
Chihiro Okamoto, Kurashiki, JP;
Shinya Kato, Kurashiki, JP;
Assignee:
Kuraray Co., Ltd., Kurashiki-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
B24B 1/00 (2006.01); B24B 7/19 (2006.01); B24B 7/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention provides a polishing pad to polish a metal layer. The polishing pad has a storage elastic modulus at 80° C. of 200 to 900 MPa and a storage elastic modulus at 110° C. of 40 MPa or less. The invention also provides a method of polishing a metal layer using the pad.