The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2012
Filed:
Jul. 05, 2007
Toshifumi Inamasu, Koshi, JP;
Fumihiko Ikeda, Koshi, JP;
Kenya Shinozaki, Koshi, JP;
Yoshitaka Otsuka, Koshi, JP;
Toshifumi Inamasu, Koshi, JP;
Fumihiko Ikeda, Koshi, JP;
Kenya Shinozaki, Koshi, JP;
Yoshitaka Otsuka, Koshi, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
Jet lines C, C, C, . . . extending in an X-direction and suction lines C, C, C, . . . extending in the X-direction are arranged alternately at a fixed pitch W in a Y-direction. Jet openingsare arranged at fixed intervals 3D on the jet lines C, suction openingsare arranged at fixed intervals 3D on the suction lines C, and the jet openingsand the suction openingson the adjacent ones of the jet lines Cand the suction lines Care spaced apart from each other by a fixed distance D with respect to the X-direction. Slotsandare extended straight from the upper ends of the jet openingsand the upper ends of the suction openings, respectively, in a carrying direction (the X-direction) and a direction opposite the carrying direction.