The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2012
Filed:
Jan. 07, 2010
Applicants:
Toshiya Kotani, Tokyo, JP;
Hiromitsu Mashita, Kanagawa, JP;
Takafumi Taguchi, Kanagawa, JP;
Ryuji Ogawa, Kanagawa, JP;
Inventors:
Toshiya Kotani, Tokyo, JP;
Hiromitsu Mashita, Kanagawa, JP;
Takafumi Taguchi, Kanagawa, JP;
Ryuji Ogawa, Kanagawa, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G06F 19/00 (2006.01); G06F 17/10 (2006.01); G06F 7/60 (2006.01); G06K 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A pattern generating method includes: extracting, from a shape of a pattern generated on a substrate, a contour of the pattern shape; setting evaluation points as verification points for the pattern shape on the contour; calculating curvatures on the contour in the evaluation points; and verifying the pattern shape based on whether the curvatures satisfy a predetermined threshold set in advance.