The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 06, 2012

Filed:

May. 31, 2011
Applicants:

Heino Heise, Adelebsen, DE;

Andreas Nolte, Rosdorf/Mengershausen, DE;

Christian Thomas, Ellwangen, DE;

Martin Edelmann, Aalen, DE;

Uwe Wolf, Magdala, DE;

Ulrich Kohlhaas, Göttingen, DE;

Dmitry Lysenkov, Oberkochen, DE;

Inventors:

Heino Heise, Adelebsen, DE;

Andreas Nolte, Rosdorf/Mengershausen, DE;

Christian Thomas, Ellwangen, DE;

Martin Edelmann, Aalen, DE;

Uwe Wolf, Magdala, DE;

Ulrich Kohlhaas, Göttingen, DE;

Dmitry Lysenkov, Oberkochen, DE;

Assignees:

Carl Zeiss MicroImaging GmbH, Jena, DE;

Carl Zeiss AG, Oberkochen, DE;

Carl Zeiss NTS GmbH, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/34 (2006.01); H01J 37/20 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

For the microscopy of an object or a specimen with a combination of optical microscopy and particle beam microscopy, an electrically conducting specimen carrier () is used which is configured for use in a particle beam microscope as well as in an optical microscope and has at least one alignment mark (). The alignment mark is configured as a pass-through structure and is detectable from the top and from the bottom of the specimen carrier.


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