The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 06, 2012

Filed:

Sep. 25, 2006
Applicants:

Koki Yano, Sodegaura, JP;

Kazuyoshi Inoue, Sodegaura, JP;

Nobuo Tanaka, Sodegaura, JP;

Tokie Tanaka, Legal Representative, Sodegaura, JP;

Yukio Shimane, Sodegaura, JP;

Inventors:

Koki Yano, Sodegaura, JP;

Kazuyoshi Inoue, Sodegaura, JP;

Nobuo Tanaka, Sodegaura, JP;

Tokie Tanaka, legal representative, Sodegaura, JP;

Yukio Shimane, Sodegaura, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/453 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
Abstract

A sputtering target which is composed of a sintered body of an oxide containing indium, tin and zinc as main components; the atomic ratio of In/(In+Sn+Zn) being 0.10 to 0.35; the atomic ratio of Sn/(In+Sn+Zn) being 0.15 to 0.35; and the atomic ratio of Zn/(In+Sn+Zn) being 0.50 to 0.70; and containing a hexagonal layered compound shown by InO(ZnO), wherein m is an integer of 3 to 9, and a spinel structure compound shown by ZnSnO.


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