The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2012
Filed:
Jul. 31, 2008
Applicants:
Thomas Hamelin, Georgetown, MA (US);
Arthur H. Laflamme, Jr., Rowley, MA (US);
Gregory R. Whyman, West Newbury, MA (US);
Inventors:
Thomas Hamelin, Georgetown, MA (US);
Arthur H. Laflamme, Jr., Rowley, MA (US);
Gregory R. Whyman, West Newbury, MA (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/08 (2006.01); B08B 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A high throughput thermal treatment system for processing a plurality of substrates is described. The thermal treatment system is configured to thermally treat a plurality of substrates chemically treated in a dry, non-plasma environment.
Hamelin, Thomas. (2012). High throughput thermal treatment system and method of operating (U.S. Patent No. 8303715). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8303715
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile