The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2012
Filed:
Jan. 26, 2010
Joerg Braeuer, Chemnitz, DE;
Thomas Gessner, Chemnitz, DE;
Lutz Hofmann, Chemnitz, DE;
Joerg Froemel, Chemnitz, DE;
Maik Wiemer, Limbach-Oberfrohna, DE;
Holger Letsch, Muehlhausen, DE;
Mario Baum, Scharfenstein, DE;
Joerg Braeuer, Chemnitz, DE;
Thomas Gessner, Chemnitz, DE;
Lutz Hofmann, Chemnitz, DE;
Joerg Froemel, Chemnitz, DE;
Maik Wiemer, Limbach-Oberfrohna, DE;
Holger Letsch, Muehlhausen, DE;
Mario Baum, Scharfenstein, DE;
Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V., Munich, DE;
Technische Universitaet Chemnitz, Chemnitz, DE;
Abstract
A microstructure has at least one bonding substrate and a reactive multilayer system. The reactive multilayer system has at least one surface layer of the bonding substrate with vertically oriented nanostructures spaced apart from one another. Regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A method for producing at least one bonding substrate and a reactive multilayer system, includes, for forming the reactive multilayer system, at least one surface layer of the bonding substrate is patterned or deposited in patterned fashion with the formation of vertically oriented nanostructures spaced apart from one another, and regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A microsystem is formed from two bonding substrates and a construction lying between the bonding substrates, the construction having a reacted reactive layer system. The microsystem is a sensor coated with biomaterial and/or has elements composed of polymeric material and/or at least one magnetic and/or piezoelectric and/or piezoresistive component.